標題: Enhancement of detection by selective modification of silicon nanobelt field-effect transistors via localized Joule heating
作者: Liu, Hao Heng
Lin, Tzung Han
Sheu, Jeng-Tzong
材料科學與工程學系奈米科技碩博班
Graduate Program of Nanotechnology , Department of Materials Science and Engineering
關鍵字: Methoxy-poly (ethylene-glycol)-silane;Silicon nanobelt field-effect transistor;Localized Joule heating;Selective modification;Streptavidin
公開日期: 1-三月-2014
摘要: We utilized localized Joule heating to ablate methoxy-poly (ethylene-glycol)-silane (mPEG-sil) modified on the p(-) region of an n(+)-p(-)-n(+) silicon nanobelt field-effect transistor (SNFET). SNFETs with selective modifications of 3-aminopropyltrimethoxysilane (APTMS) and NHS-biotin on the ablated region exhibited a faster sensing response rate and a higher sensitivity in real-time detection of Streptavidin (SA). Characterization of the ablated region via lateral force microscopy and the fluorescence image show that the ablation region occurs only in the p(-) region near the drain side and is believed to be a result of the impact ionization mechanism during Joule heating. Moreover, a bias of 20 V pulse voltage for 1 ms successfully ablates mPEG-sil and reduces the device off leakage current by 1 order after Joule heating. However, Joule heating with a pulse voltage larger than 20V (1 ms) yielded an increase of device off leakage owing to damage to gate dielectrics during Joule heating. A comparison of real-time detection of SA between selectively and non-selectively modified chips shows that selectively modified ones exhibit a better limit of detection (LOD) that is one order lower than non-selectively modified ones, and a sensing response rate twice as fast as the non-selectively modified one for every target concentration. (C) 2013 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.snb.2013.10.102
http://hdl.handle.net/11536/23575
ISSN: 0925-4005
DOI: 10.1016/j.snb.2013.10.102
期刊: SENSORS AND ACTUATORS B-CHEMICAL
Volume: 192
Issue: 
起始頁: 111
結束頁: 116
顯示於類別:期刊論文


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  1. 000329167500017.pdf