標題: Dislocation Energetics and Pop-Ins in AlN Thin Films by Berkovich Nanoindentation
作者: Jian, Sheng-Rui
Tseng, Yu-Chin
Teng, I-Ju
Juang, Jenh-Yih
電子物理學系
Department of Electrophysics
關鍵字: nanoindentation;pop-ins;AlN thin films;transmission electron microscopy
公開日期: 1-Sep-2013
摘要: Nanoindentation-induced multiple pop-ins were observed in the load-displacement curves when the mechanical responses of AlN films grown on c-plane sapphire substrates were investigated by using Berkovich indenters. No evidence of phase transformation is revealed by cross-sectional transmission electron microscopy (XTEM) and selected area diffraction (SAD) analyses. Instead XTEM observations suggest that these "instabilities" resulted from the sudden nucleation of dislocations propagating along the slip systems lying on the {0001} basal planes and the {10 (1) over bar1} pyramidal planes commonly observed in hexagonal compound semiconductors. Based on this scenario, an energetic estimation of dislocation nucleation is made.
URI: http://dx.doi.org/10.3390/ma6094259
http://hdl.handle.net/11536/23554
ISSN: 1996-1944
DOI: 10.3390/ma6094259
期刊: MATERIALS
Volume: 6
Issue: 9
起始頁: 4259
結束頁: 4267
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