標題: Improving the stability and reproducibility of the carbon nanotube gas ionization sensor by Co-Ti/Ti co-deposited catalyst layer
作者: Chang, Chia-Tsung
Huang, Chun-Yu
Li, Yu-Ren
Cheng, Huang-Chung
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: Gas ionization characteristics (GIS);Carbon nanotube (CNT);Breakdown voltage
公開日期: 1-Dec-2013
摘要: A novel gas ionization sensor (GIS) of the carbon nanotube (CNT) film using the Co-Ti/Ti co-deposited catalyst layer had been proposed for the first time to exhibit higher stability and better reproducibility with respect to the CNT film ones with the single catalyst layer. For the proposed CNT GIS, the variation of the breakdown voltage (V-br) was less than 25% for the ten devices with the same structure measurement since the lengths of the CNT synthesized were uniform and aligned. Besides, the fluctuation of the V-br was about 14% during 1000 operation times in nitrogen at the pressure of 0.035 Torr. It was attributed to the adhesion between CNTs and the substrate could be improved since the co-deposited catalyst layer and Ti adhesion layer would be coalesced so that the Co nanoparticles would be partially immersed into Ti layer after hydrogen pretreatment. Such a CNT GIS with the co-deposited catalyst layer also exhibited high sensitivity and selectivity for different kinds of gases detection as well as the good linearity for detecting the gas mixture. (C) 2013 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.sna.2013.08.040
http://hdl.handle.net/11536/23218
ISSN: 0924-4247
DOI: 10.1016/j.sna.2013.08.040
期刊: SENSORS AND ACTUATORS A-PHYSICAL
Volume: 203
Issue: 
起始頁: 137
結束頁: 141
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