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dc.contributor.authorPan, Shan-Pengen_US
dc.contributor.authorLiu, Tzong-Shien_US
dc.contributor.authorTasi, Min-Chingen_US
dc.contributor.authorLiou, Huay-Chungen_US
dc.date.accessioned2014-12-08T15:33:02Z-
dc.date.available2014-12-08T15:33:02Z-
dc.date.issued2011-06-01en_US
dc.identifier.issn0021-4922en_US
dc.identifier.urihttp://dx.doi.org/10.1143/JJAP.50.06GJ05en_US
dc.identifier.urihttp://hdl.handle.net/11536/23003-
dc.description.abstractA two-dimensional (2D) grating is useful for calibrating the accuracy of an electron microscope and atomic force microscope (AFM). An inter laboratory comparison has been carried out for measuring pitches and angles of 2D gratings with 292 and 1000nm pitches using both AFM and an optical diffractometer (OD). The grating angle at the 292nm pitch size was obtained at some of the laboratories by the conventional OD method. However, they could not measure the grating angle when the grating pitch was smaller than (lambda/2) x root 2, where lambda denotes the laser wavelength. We propose a diffraction angle rotation method of grating angle measurements. Using a precision rotary table along with diffractive light, we accurately measure a 2D grating angle for any pitch size larger than lambda/2. (C) 2011 The Japan Society of Applied Physicsen_US
dc.language.isoen_USen_US
dc.titleMethod for Determining the Angle in Two Dimension Nanoscale: Pitch Gratingen_US
dc.typeArticleen_US
dc.identifier.doi10.1143/JJAP.50.06GJ05en_US
dc.identifier.journalJAPANESE JOURNAL OF APPLIED PHYSICSen_US
dc.citation.volume50en_US
dc.citation.issue6en_US
dc.citation.epageen_US
dc.contributor.department機械工程學系zh_TW
dc.contributor.departmentDepartment of Mechanical Engineeringen_US
dc.identifier.wosnumberWOS:000291748900086-
dc.citation.woscount0-
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