標題: Polysilicon Nanowire Sensor Devices Based on High-k Dielectric Membrane for pH Sensing and DNA Detection
作者: Wu, Chun-Yu
Hsu, Po-Yen
Wang, Chao-Lung
Liao, Ta-Chuan
Cheng, Huang-Chung
Wu, You-Lin
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 2012
摘要: The pH sensing characteristics of poly-Si nanowires with high-k sensing membranes are investigated. As a result, the sensing membrane of HfO2 exhibits higher sensitivity and better reproducibility test as compared with TEOS SiO2, Al2O3, TiO2 films. The sensor device with HfO2 dielectric membrane reveals a great pH sensitivity of 172.8 nA/pH. In additon, the label-free DNA detection ability of the poly-Si nanowires is also demonstrated. The 10-base-long single-strained homopolymers DNA molecule solution with an ultra-low concentration of 0.01nM can be detected by using HfO2 sensing film. Such a poly-Si nanowires structure with HfO2 sensing membrane is very suitable for future biochemical sensors applications.
URI: http://hdl.handle.net/11536/22896
http://dx.doi.org/10.1149/1.3700918
ISBN: 978-1-60768-313-1
ISSN: 1938-5862
DOI: 10.1149/1.3700918
期刊: DIELECTRICS FOR NANOSYSTEMS 5: MATERIALS SCIENCE, PROCESSING, RELIABILITY, AND MANUFACTURING -AND-TUTORIALS IN NANOTECHNOLOGY: MORE THAN MOORE - BEYOND CMOS EMERGING MATERIALS AND DEVICES
Volume: 45
Issue: 3
起始頁: 537
結束頁: 542
Appears in Collections:Conferences Paper


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