標題: Oxygen Plasma Functionalized Multiwalled Carbon Nanotube Thin Film as A pH Sensing Membrane of Extended-Gate Field-Effect Transistor
作者: Tsai, Wan-Lin
Huang, Bai-Tao
Yang, Po-Yu
Wang, Kuang-Yu
Hsiao, Ching
Cheng, Huang-Chung
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: Carbon nanotube thin film (CNTF);extended-gate field-effect transistor (EGFET);sensor
公開日期: 1-Oct-2013
摘要: High-performance pH sening membranes of extended-gate field-effect transistors (EGFETs) composed only of oxygen-plasma-functionalized carbon nanotube thin films (CNTFs) are demonstrated. A large number of oxygen-containing functional groups are decorated on the sidewalls of carbon nanotubes (CNTs) after the oxygen plasma treatment. These functional groups act as the sensing sites and accurately respond to the ions of interest in different pH levels. Therefore, these functionalized CNTFs as the pH-EGFET sensing membranes can achieve a high voltage sensitivity of 56.8 mV/pH, a large voltage linearity of 0.9995, and a wide sensing range of pH 1-13. In addition, the oxygen-plasma-functionalized CNTFs also exhibit superior reliability with a small hysteresis voltage of 4.98 mV.
URI: http://dx.doi.org/10.1109/LED.2013.2278214
http://hdl.handle.net/11536/22693
ISSN: 0741-3106
DOI: 10.1109/LED.2013.2278214
期刊: IEEE ELECTRON DEVICE LETTERS
Volume: 34
Issue: 10
起始頁: 1307
結束頁: 1309
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