Title: Library-Based Illumination Synthesis for Critical CMOS Patterning
Authors: Yu, Jue-Chin
Yu, Peichen
Chao, Hsueh-Yung
Department of Photonics
Keywords: Inverse lithography;objective function;optical lithography;segment-based optical proximity correction (OPC);source mask optimization (SMO);source synthesis
Issue Date: 1-Jul-2013
Abstract: In optical microlithography, the illumination source for critical complementary metal oxide semiconductor layers needs to be determined in the early stage of a technology node with very limited design information, leading to simple binary shapes. Recently, the availability of freeform sources permits us to increase pattern fidelity and relax mask complexities with minimal insertion risks to the current manufacturing flow. However, source optimization across many patterns is often treated as a design-of-experiments problem, which may not fully exploit the benefits of a freeform source. In this paper, a rigorous source-optimization algorithm is presented via linear superposition of optimal sources for pre-selected patterns. We show that analytical solutions are made possible by using Hopkins formulation and quadratic programming. The algorithm allows synthesized illumination to be linked with assorted pattern libraries, which has a direct impact on design rule studies for early planning and design automation for full wafer optimization.
URI: http://dx.doi.org/10.1109/TIP.2013.2253482
ISSN: 1057-7149
DOI: 10.1109/TIP.2013.2253482
Volume: 22
Issue: 7
Begin Page: 2811
End Page: 2821
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