標題: Investigations on Diamond Nanostructuring of Different Morphologies by the Reactive-Ion Etching Process and Their Potential Applications
作者: Kunuku, Srinivasu
Sankaran, Kamatchi Jothiramalingam
Tsai, Cheng-Yen
Chang, Wen-Hao
Tai, Nyan-Hwa
Leou, Keh-Chyang
Lin, I-Nan
電子物理學系
Department of Electrophysics
關鍵字: diamond nanostructures;reactive ion etching;Au nanodots;ion bombardment;electron field emission;photoluminescence
公開日期: 14-Aug-2013
摘要: We report the systematic studies on the fabrication of aligned, uniform, and highly dense diamond nanostructures from diamond films of various granular structures. Self-assembled Au nanodots are used as a mask in the self-biased reactive-ion etching (RIE) process, using an O-2/CF4 process plasma. The morphology of diamond nanostructures is a close function of the initial phase composition of diamond. Cone-shaped and tip-shaped diamond nanostructures result for microcrystalline diamond (MCD) and nanocrystalline diamond (NCD) films, whereas pillarlike and grasslike diamond nanostructures are obtained for Ar-plasma-based and N-2-plasma-based ultrananocrystalline diamond (UNCD) films, respectively. While the nitrogen-incorporated UNCD (N-UNCD) nanograss shows the most-superior electron-field-emission properties, the NCD nanotips exhibit the best photoluminescence properties, viz, different applications need different morphology of diamond nanostructures to optimize the respective characteristics. The optimum diamond nanostructure can be achieved by proper choice of granular structure of the initial diamond film. The etching mechanism is explained by in situ observation of optical emission spectrum of RIE plasma. The preferential etching of sp(2)-bonded carbon contained in the diamond films is the prime factor, which forms the unique diamond nanostructures from each type of diamond films. However, the excited oxygen atoms (O*) are the main etching species of diamond film.
URI: http://dx.doi.org/10.1021/am401753h
http://hdl.handle.net/11536/22553
ISSN: 1944-8244
DOI: 10.1021/am401753h
期刊: ACS APPLIED MATERIALS & INTERFACES
Volume: 5
Issue: 15
起始頁: 7439
結束頁: 7449
Appears in Collections:Articles