Title: High quality factor nonpolar GaN photonic crystal nanocavities
Authors: Wu, Tzeng-Tsong
Lo, Sheng-Yun
Huang, Huei-Min
Tsao, Che-Wei
Lu, Tien-Chang
Wang, Shing-Chung
Department of Photonics
Issue Date: 13-May-2013
Abstract: High quality factor a-plane nonpolar GaN two-dimensional photonic crystal (PC) nanocavities on r-plane sapphire substrates have been demonstrated. Nonpolar GaN PC nanocavities on a thin membrane structure were realized by using e-beam lithography to define the PC patterns and focused-ion beam milling to fabricate the suspended thin membrane. A dominant resonant mode at 388 nm with a high quality factor of approximately 4300 has been demonstrated at 77K by the micro-photoluminescence system. Moreover, the degree of polarization of the emission from the non-polar GaN PC nanocavity was measured to be 64% along the m crystalline direction. (C) 2013 AIP Publishing LLC.
URI: http://dx.doi.org/10.1063/1.4807137
ISSN: 0003-6951
DOI: 10.1063/1.4807137
Volume: 102
Issue: 19
End Page: 
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