標題: Effect of arrangement of carbon nanotube pillars on its gas ionization characteristics
作者: Chang, Chia-Tsung
Huang, Chun-Yu
Li, Yu-Ren
Cheng, Huang-Chung
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: Carbon nanotube (CNT) pillars;Gas ionization sensor (GIS);Field enhancement factor;Breakdown voltage
公開日期: 1-六月-2013
摘要: The gas ionization sensors (GISs) using the carbon nanotube (CNT) pillars which has the pillar height (H) of 15 mu m with interpillar spacing (R) of 30 mu m as the cathode had been proposed for the first time to exhibit the 20 times higher field enhancement factor (beta) and the lower breakdown voltage of 350V with respect to the CNT film ones for nitrogen gas at the pressure of 0.035 Torr. As the H increased from 5 mu m to 15 mu m, the beta increased with increasing the H since the electrical field could be enhanced via the aspect ratio increment. However, as the H increased from 15 mu m to 60 mu m, the beta decreased with increasing the H owing to the increased field-screening effect. Such an optimum GIS with the CNT pillars also exhibited high sensitivity and selectivity for different kinds of gases detection as well as the good linearity for detecting the gas mixture. (C) 2013 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.sna.2013.02.028
http://hdl.handle.net/11536/22344
ISSN: 0924-4247
DOI: 10.1016/j.sna.2013.02.028
期刊: SENSORS AND ACTUATORS A-PHYSICAL
Volume: 195
Issue: 
起始頁: 60
結束頁: 63
顯示於類別:期刊論文


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