Title: A new hybrid method for H2S-sensitive devices using WO3-based film and ACF interconnect
Authors: Kuo, Li Min
Shih, Yu-Tai
Wu, Cen-Shawn
Lin, Yu-Chi
Chao, Shuchi
Department of Electrophysics
College of Electrical and Computer Engineering
Keywords: H2S;gas sensor;ACF;WO3;Au-catalyst
Issue Date: 1-Jul-2013
Abstract: A new hybrid integration method has been reported for process simplification of conventional metal-oxide sensors with a gold (Au) dopant-like catalyst during hydrogen sulfide (H2S) gas detections at room temperature. Different from conventional fabrications, an anisotropic conduction film (ACF) followed by a sputtered tungsten oxide (WO3) film tapped on Cu electrodes has been utilized in consumer applications. The process steps were reduced without compromising electrical performances. The treated ACF with a thin WO3 film, coated across two closely spaced microelectrodes is employed as the H2S solid-state sensor at room temperature. Apart from exhibiting good interconnects as conductive bumps, Au dopant-like catalyst within ACF will also produce a lower barrier between the bands of electronics, and therefore improve the electrical conductivity significantly. Our integration method offers a number of merits, including high sensitivity to the reference gas, lead-free bonding connection, low-temperature fabrication, high throughput and less fabrication time.
URI: http://dx.doi.org/10.1088/0957-0233/24/7/075105
ISSN: 0957-0233
DOI: 10.1088/0957-0233/24/7/075105
Volume: 24
Issue: 7
End Page: 
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