標題: Carbon-Coated Porous Aluminum Oxides Used as Spacer Overlayers to Reduce Secondary Electron Emission for Field Emission Display Applications
作者: Yu, Tung-Yuan
Pan, Fu-Ming
Chen, Cheng-Li
Chen, Te-Ming
Chen, Tsung-Han
Kuo, Chih-Che
Lin, Ting-Li
材料科學與工程學系
Department of Materials Science and Engineering
公開日期: 1-七月-2013
摘要: Porous surface structures can mitigate the charging effect of vacuum spacers of field-emission flat panel display due to the abundance of secondary electrons (SEs) emitted from the spacers during field emission display (FED) operation. In this study, we fabricated porous anodic aluminum oxide (AAO) overlayers on glass substrates to examine the effect of carbon deposition on the reduction of SE emissions. This paper reports that uniform AAO overlayers can be simultaneously prepared on both sides of a glass plate 2 x 10 cm(2) in size. The SE emission of the AAO overlayer was examined by using an Auger electron microscope. When a small amount of carbon is evaporation-deposited on the as-prepared AAO overlayer, the SE emission efficiency is significantly decreased and the reduction in the SE emission is ascribed to the low SE yield of the carbon deposit and the suppression of SE escape from the narrowed pore channels. However, a heavy deposition of carbon results in a smaller surface roughness of the AAO overlayer, thereby increasing SE emission. The carbon-coated AAO overlayer demonstrates favorable electrical and mechanical properties, making it suitable for use in FED vacuum spacers. (C) 2013 The Japan Society of Applied Physics
URI: http://dx.doi.org/10.7567/JJAP.52.075801
http://hdl.handle.net/11536/22238
ISSN: 0021-4922
DOI: 10.7567/JJAP.52.075801
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS
Volume: 52
Issue: 7
結束頁: 
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