Title: Two-dimensional pheromone propagation controller applied to run-to-run control for semiconductor manufacturing
Authors: Lee, Der-Shui
Lee, An-Chen
Department of Mechanical Engineering
Keywords: Two-dimensional pheromone propagation controller;Process control;Space-effect controller;Two-dimensional digital pheromone infrastructure;EWMA
Issue Date: 1-May-2013
Abstract: This paper presents a new perspective on process control, called the two-dimensional pheromone propagation controller (2D-PPC), which considers the spatial information about disturbances of the process within a wafer to generate new predicted intercepts of the models for the subsequent use in time-effect controller (the exponentially weighted moving average, EWMA, in this study). The 2D-PPC assumes that the disturbances have their own behavior and affect others nearby in a wafer at a run; thus, it involves the "space-effect" among disturbances of the process at measurement positions within a wafer. The framework of the space-time controller (STC), which interlaces the time-effect controller and the space-effect 2D-PPC is constructed, and the stability analysis and intrinsic characteristics of the STC are discussed. Simulations are conducted using two-dimensional anthropogenic disturbances generated from fabrication data. The results show that the STC has better performance as compared to the conventional time-effect controllers. From implementation view point, since STC does not change the original code of time-effect controller, it can be easily implemented in the current process control loop by only adding an additional space-effect controller.
URI: http://dx.doi.org/10.1007/s00170-012-4377-8
ISSN: 0268-3768
DOI: 10.1007/s00170-012-4377-8
Volume: 66
Issue: 5-8
Begin Page: 917
End Page: 936
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