標題: Controlled deposition of new organic ultrathin film as a gate dielectric layer for advanced flexible capacitor devices
作者: Meena, Jagan Singh
Chu, Min-Ching
Singh, Ranjodh
Shieh, Han-Ping D.
Liu, Po-Tsun
Ko, Fu-Hsiang
材料科學與工程學系
光電工程學系
顯示科技研究所
Department of Materials Science and Engineering
Department of Photonics
Institute of Display
公開日期: 1-六月-2013
摘要: This letter describes a new organic (1-bromoadamantane) ultrathin film as gate dielectric, which was successfully deposited by sol-gel spin-coating process on a flexible polyimide substrate at room temperature. The metal-insulator-metal (MIM) device with organic (1-bromoadamantane) ultrathin (10 nm) film as gate dielectric layer operated at gate voltage of 5.0 V, showing a low leakage current density (5.63 x 10(-10) A cm(-2) at 5 V) and good capacitance (2.01 fF mu m(-2) at 1 MHz). The chemical structure of the 1-bromoadamantane layer was investigated by Fourier transform infrared spectrometer. The excellent leakage current density and better capacitance, probably due to the presence of polar, non-polar, low-polar groups, and bromine atoms in ultrathin film. Practical properties of the film in MIM capacitor such as dielectric constant as well as bending result of leakage current density and breakdown voltage have been better related to such fundamental adhesion nature over flexible substrate. This permits estimation of the properties of new dielectric in thin film form and short lists of the best materials for low loss and good capacitance flexible capacitors could be drawn up in future.
URI: http://dx.doi.org/10.1007/s10854-012-1016-y
http://hdl.handle.net/11536/21862
ISSN: 0957-4522
DOI: 10.1007/s10854-012-1016-y
期刊: JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume: 24
Issue: 6
起始頁: 1807
結束頁: 1812
顯示於類別:期刊論文


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  1. 000319354100012.pdf