Title: An automatic optical inspection system for measuring a microlens array with an optical interferometric microscope and genetic algorithm
Authors: Yang, Shih-Wei
Lin, Chern-Sheng
Lin, Shir-Kuan
Fu, Shu-Hsien
Yeh, Mau-Shiun
Institute of Electrical and Control Engineering
Keywords: Inspection;Automation;Genetic algorithms;Surface properties of materials;Automatic optical inspection system;Microlens array;Surface profile
Issue Date: 2013
Abstract: Purpose - The purpose of this paper is to propose an automatic optical inspection system for measuring the surface profile of a microlens array. Design/methodology/approach - The system set-up was constructed according to the principle of the Fizeau interferometer. After capturing the ring interference fringe images of the microlens with a camera, the diameter, profile information and optical properties were analyzed through a microlens surface profile algorithm using innovative image pre-processing with a precision of less than 0.09 micron. Findings - By integrating with the genetic algorithm, the XY-Table shortest moving path of the system is calculated to achieve the purpose of highspeed inspection and automatic microlens array surface profile measurement. Originality/value - The measurement results of this system were also compared with other systems, including the atomic force microscope and stylus profiler, to verify the measurement precision and accuracy of this system.
URI: http://hdl.handle.net/11536/21469
ISSN: 0144-5154
DOI: 10.1108/01445151311294720
Volume: 33
Issue: 1
Begin Page: 57
End Page: 67
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