標題: An automatic optical inspection system for measuring a microlens array with an optical interferometric microscope and genetic algorithm
作者: Yang, Shih-Wei
Lin, Chern-Sheng
Lin, Shir-Kuan
Fu, Shu-Hsien
Yeh, Mau-Shiun
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: Inspection;Automation;Genetic algorithms;Surface properties of materials;Automatic optical inspection system;Microlens array;Surface profile
公開日期: 2013
摘要: Purpose - The purpose of this paper is to propose an automatic optical inspection system for measuring the surface profile of a microlens array. Design/methodology/approach - The system set-up was constructed according to the principle of the Fizeau interferometer. After capturing the ring interference fringe images of the microlens with a camera, the diameter, profile information and optical properties were analyzed through a microlens surface profile algorithm using innovative image pre-processing with a precision of less than 0.09 micron. Findings - By integrating with the genetic algorithm, the XY-Table shortest moving path of the system is calculated to achieve the purpose of highspeed inspection and automatic microlens array surface profile measurement. Originality/value - The measurement results of this system were also compared with other systems, including the atomic force microscope and stylus profiler, to verify the measurement precision and accuracy of this system.
URI: http://hdl.handle.net/11536/21469
http://dx.doi.org/10.1108/01445151311294720
ISSN: 0144-5154
DOI: 10.1108/01445151311294720
期刊: ASSEMBLY AUTOMATION
Volume: 33
Issue: 1
起始頁: 57
結束頁: 67
顯示於類別:期刊論文


文件中的檔案:

  1. 000316240000006.pdf