Title: Nonvolatile floating gate memory characteristics of Sb2Te-SiO2 nanocomposite thin films
Authors: Yang, Cheng-Hsun
Chiang, Kuo-Chang
Hsieh, Tsung-Eong
Department of Materials Science and Engineering
Keywords: Chalcogenides;Sb2Te;Nanocomposite;Nonvolatile floating gate memory
Issue Date: 1-Feb-2013
Abstract: Nonvolatile floating gate memory (NFGM) device composed of Sb2Te nanocrystals (NCs) as the charge-storage traps embedded in SiO2 matrix was prepared by the target-attachment sputtering method at various nitrogen (N-2) incorporation conditions. Via post annealing at 450 degrees C in ambient air, the sample prepared at the condition N-2/Ar=0.1 exhibited a maximum memory window (Delta V-FB) shift=4.4 V and charge density=4.2x10(12) cm(-2) under +/- 7 V gate voltage sweep. N-2 incorporation not only reduced the Sb2Te NC size to about 5 nm, but also suppressed the oxygen defects and antimony oxides in the sample. Feasibility of the Sb2Te chalcogenide NCs to NFGM fabrication with the simplified process and relatively low annealing temperature is demonstrated. (C) 2012 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.tsf.2012.07.135
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.07.135
Volume: 529
Begin Page: 263
End Page: 268
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