標題: Structure and property of epitaxial titanium oxynitride grown on MgO(001) substrate by pulsed laser deposition
作者: Do, Hien
Wu, Yue-Han
Van-Truong Dai
Peng, Chun-Yen
Yen, Tzu-Chun
Chang, Li
材料科學與工程學系
電子工程學系及電子研究所
Department of Materials Science and Engineering
Department of Electronics Engineering and Institute of Electronics
關鍵字: Titanium oxynitride;Epitaxial growth;Pulsed laser deposition;Nanoindentation
公開日期: 15-一月-2013
摘要: High-quality epitaxial TiNxOy, films with different oxygen content were deposited on MgO(001) substrates by pulsed laser deposition method. The chemical composition of the deposited films was determined by X-ray photoelectron spectroscopy. X-ray diffraction results showed that the TiNxOy films are heteroepitaxially grown on MgO with good crystallinity and their lattice parameters decrease with increased oxygen concentration. Transmission electron microscopy analyses showed that TiNxOy films contain a low density of dislocations. Atomic force microscopy revealed very smooth surfaces of TiNxOy films with roughness of 026-0.29 nm. The resistivity of TiNxOy, films determined by Hall measurement was about 28-33 mu Omega cm. Nanoindentation measurements showed the film hardness and Young's modulus of about 23-26 GPa and 400-430 GPa, respectively. (C) 2012 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.surfcoat.2012.11.008
http://hdl.handle.net/11536/21264
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2012.11.008
期刊: SURFACE & COATINGS TECHNOLOGY
Volume: 214
Issue: 
起始頁: 91
結束頁: 96
顯示於類別:期刊論文


文件中的檔案:

  1. 000315004000013.pdf