標題: Microstructure and magnetic properties of oxidized titanium nitride thin films in situ grown by pulsed laser deposition
作者: Chen, S. C.
Sung, K. Y.
Tzeng, W. Y.
Wu, K. H.
Juang, J. Y.
Uen, T. M.
Luo, C. W.
Lin, J-Y
Kobayashi, T.
Kuo, H. C.
電子物理學系
物理研究所
光電工程學系
Department of Electrophysics
Institute of Physics
Department of Photonics
公開日期: 20-二月-2013
摘要: Different oxidation states of titanium nitride thin films, including pure TiN(h 0 0), TiN1-xOx(h 0 0), Ti2O3(0 0 l) and pure anatase TiO2(0 0 l), were prepared by pulsed laser deposition with various oxygen pressures (P-O2) using a TiN target. Elaborative evolutions of the crystal and electronic structures of the obtained films were examined systematically by x-ray diffraction and x-ray absorption spectroscopy. We found that the Ti2O3(0 0 l) film, which was prepared at oxygen pressures P-O2 = 10(-4) Torr, exhibited the maximum room temperature ferromagnetism (RTFM) behaviour. The bound magnetic polaron model is used to clarify the origin of RTFM in these films.
URI: http://dx.doi.org/10.1088/0022-3727/46/7/075002
http://hdl.handle.net/11536/21210
ISSN: 0022-3727
DOI: 10.1088/0022-3727/46/7/075002
期刊: JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume: 46
Issue: 7
結束頁: 
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