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dc.contributor.authorDeng, Qing-Longen_US
dc.contributor.authorChen, Chien-Yueen_US
dc.contributor.authorLin, Wei-Lien_US
dc.contributor.authorShew, Bor-Yuanen_US
dc.contributor.authorChiang, Donyauen_US
dc.contributor.authorTang, Yu-Hsiangen_US
dc.contributor.authorLin, Bor-Shyhen_US
dc.date.accessioned2014-12-08T15:29:26Z-
dc.date.available2014-12-08T15:29:26Z-
dc.date.issued2013-03-01en_US
dc.identifier.issn0960-1317en_US
dc.identifier.urihttp://dx.doi.org/10.1088/0960-1317/23/3/035021en_US
dc.identifier.urihttp://hdl.handle.net/11536/21197-
dc.description.abstractThis study presents the technological process for producing a lenticular array on quartz. With scanning immersion lithography used to define the 3D lenticular array structure on a quartz substrate, inductively coupled plasma-reactive ion etching (ICP-RIE) is able to directly etch the structure. Based on the surface measurement, ICP-RIE can completely etch the surface structure onto the quartz substrate, and the surface roughness can reach 30 nm. Furthermore, after the optical measurement of stereoscopic images, the left and the right stereoscopic images can be successfully transmitted to the corresponding places without crosstalk and with a splitting efficiency close to 80%. As a result, this technology allows for the production of a lenticular structure with various changes on the quartz surface.en_US
dc.language.isoen_USen_US
dc.titleTransfer of a continuous-relief lenticular array onto a quartz substrate by using SIL combined with the dry-etching methoden_US
dc.typeArticleen_US
dc.identifier.doi10.1088/0960-1317/23/3/035021en_US
dc.identifier.journalJOURNAL OF MICROMECHANICS AND MICROENGINEERINGen_US
dc.citation.volume23en_US
dc.citation.issue3en_US
dc.citation.epageen_US
dc.contributor.department光電系統研究所zh_TW
dc.contributor.department影像與生醫光電研究所zh_TW
dc.contributor.departmentInstitute of Photonic Systemen_US
dc.contributor.departmentInstitute of Imaging and Biomedical Photonicsen_US
dc.identifier.wosnumberWOS:000314816800022-
dc.citation.woscount0-
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