標題: 3D surface profile measurement of unsymmetrical microstructure using Fizeau interferometric microscope
作者: Yang, Shih-Wei
Lin, Chern-Sheng
Lin, Shir-Kuan
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: 3D surface profile;Unsymmetrical microstructure;Fizeau interferometer;Bezier curve
公開日期: 1-四月-2013
摘要: In this paper, an automatic optical inspection system for the 3D surface profile of an unsymmetrical microstructure using Fizeau interferometer was proposed. This non-contact optical inspection system is suitable for measuring the lens sag and 3D surface profile of symmetrical and unsymmetrical microlenses. Referring to the unsymmetrical microlenses as an example, the distribution of the interference fringes is partly dense and partly rare, and is completely different from the equally dense distribution of symmetrical microlenses. Thus, a novel algorithm is proposed to solve the above mentioned problem in this paper, namely, individually determining the darkest points of the dark fringes and the brightest points of the bright fringes, and fitting these discrete points as close curves through the Bezier curve theory. As the contour lines of an unsymmetrical microlens are obtained, the 3D surface profile of the unsymmetrical microlens can be plotted correspondingly. Furthermore, the proposed system has the following advantages due to its non-contact structure. This system is specifically designed for in-line measurements according to the rapid inspection speed; it has no need to coat a reflective layer on the inspected microstructure, thus avoiding damaging the surface structure of the sample. (C) 2012 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.optlaseng.2012.12.004
http://hdl.handle.net/11536/21165
ISSN: 0143-8166
DOI: 10.1016/j.optlaseng.2012.12.004
期刊: OPTICS AND LASERS IN ENGINEERING
Volume: 51
Issue: 4
起始頁: 348
結束頁: 357
顯示於類別:期刊論文


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  1. 000314860500003.pdf