標題: Chemical vapor deposition of diamond on silicon substrates coated with adamantane in glycol chemical solutions
作者: Chen, Yi-Chun
Chang, Li
材料科學與工程學系
Department of Materials Science and Engineering
公開日期: 2013
摘要: Diamonds were synthesized on adamantane-coated mirror-polished Si (100) substrates by microwave plasma chemical vapor deposition (MPCVD) using a gas mixture of H-2 and CH4. Before MPCVD deposition, Si substrates were dip-coated in chemical solutions of ethylene glycol and diethylene glycol with adamantane. With the coating of adamantane, the diamond nucleation can be enhanced with a density over 1 x 10(8) cm(-2) and the deposited diamond films are shown to be of good crystallinity by scanning electron microscopy and Raman spectrometry. The study demonstrates a simple and efficient way of diamond deposition on a smooth Si substrate.
URI: http://hdl.handle.net/11536/21095
http://dx.doi.org/10.1039/c2ra22486k
ISSN: 2046-2069
DOI: 10.1039/c2ra22486k
期刊: RSC ADVANCES
Volume: 3
Issue: 5
起始頁: 1514
結束頁: 1518
顯示於類別:期刊論文


文件中的檔案:

  1. 000313009700033.pdf