標題: Fabrication of a double-sided micro-lens array by a glass molding technique
作者: Huang, Chien-Yao
Hsiao, Wen-Tse
Huang, Kuo-Cheng
Chang, Keng-Souo
Chou, Hsiao-Yu
Chou, Chang-Pin
機械工程學系
Department of Mechanical Engineering
公開日期: 1-八月-2011
摘要: In recent years, micro-lens arrays (MLAs) have become important elements of optical systems. One function of MLAs is to create a uniform intensity of light. Compared with one-sided MLAs, the uniformity of light intensity increases with double-sided MLAs. MLAs fabricated by glass can be used in higher temperature environments or in high-energy systems. Glass-based MLAs can be fabricated by laser machining, photolithography, precision diamond grinding process and precision glass molding (PGM) technologies, but laser machining, photolithography and precision diamond grinding process technologies are not the perfect approach for mass production. Therefore, this paper proposes a method to fabricate a mold by laser micro-machining and a double-sided MLA by a PGM process. First, a micro-hole array was fabricated on the surface of a silicon carbide mold. A double-sided MLA using two molds was then formed by a PGM process. In this paper, the PGM process parameters including molding temperature and molding force are discussed. Moreover, the profile of a double-sided MLA is discussed. Finally, a double-sided MLA with a diameter of 20 mm, and lenses with a height of 52 mu m, a radius of 851 mu m and a pitch of 700 mu m were formed on glass.
URI: http://dx.doi.org/10.1088/0960-1317/21/8/085020
http://hdl.handle.net/11536/21048
ISSN: 0960-1317
DOI: 10.1088/0960-1317/21/8/085020
期刊: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 21
Issue: 8
結束頁: 
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