標題: Morphology evolution of a-plane ZnO films on r-plane sapphire with growth by pulsed laser deposition
作者: Peng, Chun-Yen
Tian, Jr-Sheng
Wang, Wei-Lin
Ho, Yen-Teng
Chang, Li
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: ZnO;Morphology;Epitaxial growth
公開日期: 15-一月-2013
摘要: In this study, the morphology evolution of epitaxial a-plane ZnO on r-plane sapphire at low and high temperatures with growth by pulsed laser deposition (PLD) are presented. Examination of the surfaces of ZnO films during growth was done with in situ reflection high energy electron diffraction, and atomic force microscopy was used to examine the surface morphology of the corresponding films after growth. For initial growth, it was observed that (1 x 2) reconstruction on ZnO grown at 750 degrees C (HT-ZnO) occurred with step-flow growth, while ZnO grown at 450 degrees C (LT-ZnO) exhibited island growth mode. For thick films both HT- and LT-ZnO surfaces eventually develop into stripe morphology. Significant change of surface morphology during cooling had also been observed. (C) 2012 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.apsusc.2012.11.044
http://hdl.handle.net/11536/21047
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2012.11.044
期刊: APPLIED SURFACE SCIENCE
Volume: 265
Issue: 
起始頁: 553
結束頁: 557
顯示於類別:期刊論文


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  1. 000312958500087.pdf