Title: Fabrication and optoelectronic properties of core-shell biomimetic ZnO/Si nanoball arrays
Authors: Chang, Yuan-Ming
Kao, Pin-Hsu
Liu, Mao-Chen
Lin, Chih-Ming
Lee, Hsin-Yi
Juang, Jenh-Yih
Department of Materials Science and Engineering
Master and Ph.D. Program for Science and Technology of Accelrrator Light Source
Department of Electrophysics
Issue Date: 2012
Abstract: We report an effective process scheme comprising a single-step Ag sputtering with subsequent dry etching and atomic layer deposition (ALD) process for fabricating biomimetic ZnO/Si nanoball (ZnO/Si-NB) core-shell nanostructures directly on Si substrates. The obtained ZnO/Si-NB core-shell nanostructures consist of similar to 30 nm thick ZnO films grown on Si frustums produced by means of dry etching masked by the self-assembled silver nanodots created by single-step sputtering. The ZnO films were deposited using atomic layer deposition under an ambient temperature of 200 degrees C. The photoluminescence (PL) measurements on these ZnO/Si-NB core-shell nanostructures showed that the visible range emission was almost completely absent and only the ultraviolet emission (3.28 eV peak) resulting from the free excitons was observed, indicating that the films indeed have high crystalline quality. Moreover, a dramatic improvement of the field emission performance was observed for ZnO/Si-NB core-shell nanostructures as compared to the bare Si frustum arrays. The detailed analyses on the field enhancement factor (beta value) based on the Fowler-Nordheim field emission model indicate that the effective work function of the ZnO/Si-NB core-shell nanostructures might be significantly different from that of either ZnO or Si.
URI: http://hdl.handle.net/11536/20901
ISSN: 2046-2069
DOI: 10.1039/c2ra21817h
Volume: 2
Issue: 29
Begin Page: 11089
End Page: 11094
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