標題: Fabrication and optoelectronic properties of core-shell biomimetic ZnO/Si nanoball arrays
作者: Chang, Yuan-Ming
Kao, Pin-Hsu
Liu, Mao-Chen
Lin, Chih-Ming
Lee, Hsin-Yi
Juang, Jenh-Yih
材料科學與工程學系
加速器光源科技與應用學位學程
電子物理學系
Department of Materials Science and Engineering
Master and Ph.D. Program for Science and Technology of Accelrrator Light Source
Department of Electrophysics
公開日期: 2012
摘要: We report an effective process scheme comprising a single-step Ag sputtering with subsequent dry etching and atomic layer deposition (ALD) process for fabricating biomimetic ZnO/Si nanoball (ZnO/Si-NB) core-shell nanostructures directly on Si substrates. The obtained ZnO/Si-NB core-shell nanostructures consist of similar to 30 nm thick ZnO films grown on Si frustums produced by means of dry etching masked by the self-assembled silver nanodots created by single-step sputtering. The ZnO films were deposited using atomic layer deposition under an ambient temperature of 200 degrees C. The photoluminescence (PL) measurements on these ZnO/Si-NB core-shell nanostructures showed that the visible range emission was almost completely absent and only the ultraviolet emission (3.28 eV peak) resulting from the free excitons was observed, indicating that the films indeed have high crystalline quality. Moreover, a dramatic improvement of the field emission performance was observed for ZnO/Si-NB core-shell nanostructures as compared to the bare Si frustum arrays. The detailed analyses on the field enhancement factor (beta value) based on the Fowler-Nordheim field emission model indicate that the effective work function of the ZnO/Si-NB core-shell nanostructures might be significantly different from that of either ZnO or Si.
URI: http://hdl.handle.net/11536/20901
http://dx.doi.org/10.1039/c2ra21817h
ISSN: 2046-2069
DOI: 10.1039/c2ra21817h
期刊: RSC ADVANCES
Volume: 2
Issue: 29
起始頁: 11089
結束頁: 11094
顯示於類別:期刊論文


文件中的檔案:

  1. 000312142700043.pdf