Title: A Single-Walled Carbon Nanotube Network Gas Sensing Device
Authors: Wang, Li-Chun
Tang, Kea-Tiong
Teng, I-Ju
Kuo, Cheng-Tzu
Ho, Cheng-Long
Kuo, Han-Wen
Su, Tseng-Hsiung
Yang, Shang-Ren
Shi, Gia-Nan
Chang, Chang-Ping
材料科學與工程學系
Department of Materials Science and Engineering
Keywords: single-walled carbon nanotube (SWCNT) networks;gas sensing device;chemical vapors
Issue Date: 1-Aug-2011
Abstract: The goal of this research was to develop a chemical gas sensing device based on single-walled carbon nanotube (SWCNT) networks. The SWCNT networks are synthesized on Al(2)O(3)-deposted SiO(2)/Si substrates with 10 nm-thick Fe as the catalyst precursor layer using microwave plasma chemical vapor deposition (MPCVD). The development of interconnected SWCNT networks can be exploited to recognize the identities of different chemical gases by the strength of their particular surface adsorptive and desorptive responses to various types of chemical vapors. The physical responses on the surface of the SWCNT networks cause superficial changes in the electric charge that can be converted into electronic signals for identification. In this study, we tested NO(2) and NH(3) vapors at ppm levels at room temperature with our self-made gas sensing device, which was able to obtain responses to sensitivity changes with a concentration of 10 ppm for NO(2) and 24 ppm for NH(3).
URI: http://dx.doi.org/10.3390/s110807763
http://hdl.handle.net/11536/20682
ISSN: 1424-8220
DOI: 10.3390/s110807763
Journal: SENSORS
Volume: 11
Issue: 8
Begin Page: 7763
End Page: 7772
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