標題: Design and fabrication of MEMS-based thermally-actuated image stabilizer for cell phone camera
作者: Lin, Chun-Ying
Chiou, Jin-Chern
電控工程研究所
Institute of Electrical and Control Engineering
關鍵字: Component;XY stage;Image stabilizer;MEMS;Thermal actuator
公開日期: 1-十一月-2012
摘要: A micro-electro-mechanical system (MEMS)-based image stabilizer is proposed to counteracting shaking in cell phone cameras. The proposed stabilizer (dimensions, 8.8 x 8.8 x 0.2 mm(3)) includes a two-axis decoupling XY stage and has sufficient strength to suspend an image sensor (IS) used for anti-shaking function. The XY stage is designed to send electrical signals from the suspended IS by using eight signal springs and 24 signal outputs. The maximum actuating distance of the stage is larger than 25 mu m, which is sufficient to resolve the shaking problem. Accordingly, the applied voltage for the 25 mu m moving distance is lower than 20 V: the dynamic resonant frequency of the actuating device is 4485 Hz, and the rising time is 21 ms. (c) 2012 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.sse.2012.05.013
http://hdl.handle.net/11536/20677
ISSN: 0038-1101
DOI: 10.1016/j.sse.2012.05.013
期刊: SOLID-STATE ELECTRONICS
Volume: 77
Issue: 
起始頁: 64
結束頁: 71
顯示於類別:期刊論文


文件中的檔案:

  1. 000309318900013.pdf