Title: Sub-wavelength GaN-based membrane high contrast grating reflectors
Authors: Wu, Tzeng Tsong
Syu, Yu Cheng
Wu, Shu Hsien
Chen, Wei Ting
Lu, Tien Chang
Wang, Shing Chung
Chiang, Hai Pang
Tsai, Din Ping
Department of Photonics
Institute of Display
Issue Date: 27-Aug-2012
Abstract: The GaN-based membrane high contrast grating (HCG) reflectors have been fabricated and investigated. The structural parameters including grating periods, grating height, filling factors and air-gap height were calculated to realize high reflectivity spectra with broad bandwidth by the rigorous coupled-wave analysis and finite-difference time-domain method. Based on the optimized simulation results, the GaN-based membrane HCGs were fabricated by e-beam lithography and focused-ion beam process. The fabricated GaN-based membrane HCG reflectors revealed high reflectivity at 460 nm band with large stopband width of 60 nm in the TE polarization measured by using the micro-reflectivity spectrometer. The experimental results also showed a good agreement with simulated ones. We believe this study will be helpful for development of the GaN-based novel light emitting devices in the blue or UV region. (C) 2012 Optical Society of America
URI: http://dx.doi.org/10.1364/OE.20.020551
ISSN: 1094-4087
DOI: 10.1364/OE.20.020551
Volume: 20
Issue: 18
Begin Page: 20551
End Page: 20557
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