標題: Direct observation of the lateral nonuniform channel doping profile in submicron MOSFET's from an anomalous charge pumping measurement results
作者: Chung, SS
Cheng, SM
Lee, GH
Guo, JC
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 1995
URI: http://hdl.handle.net/11536/20048
http://dx.doi.org/10.1109/VLSIT.1995.520878
ISBN: 0-7803-2602-4
DOI: 10.1109/VLSIT.1995.520878
期刊: 1995 SYMPOSIUM ON VLSI TECHNOLOGY: DIGEST OF TECHNICAL PAPERS
起始頁: 103
結束頁: 104
顯示於類別:會議論文


文件中的檔案:

  1. A1995BE44J00052.pdf