標題: Fabrication and characterization of the Pd-silicided emitters for field-emission devices
作者: Wang, CC
Ku, TK
Feng, MS
Hsieh, IJ
Cheng, HC
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: Pd silicided;field emitter;micromachining;sharpening;annealing;TEM;AES
公開日期: 1995
URI: http://hdl.handle.net/11536/19969
http://dx.doi.org/10.1117/12.220936
ISBN: 0-8194-2007-7
DOI: 10.1117/12.220936
期刊: MICROELECTRONIC STRUCTURES AND MICROELECTROMECHANICAL DEVICES FOR OPTICAL PROCESSING AND MULTIMEDIA APPLICATIONS
Volume: 2641
起始頁: 145
結束頁: 152
Appears in Collections:Conferences Paper


Files in This Item:

  1. A1995BE29Y00017.pdf