Title: Inspection of the Current-Mirror Mismatch by Secondary Electron Potential Contrast With In Situ Nanoprobe Biasing
Authors: Liu, Po-Tsun
Lee, Jeng-Han
Department of Photonics
Institute of Display
Keywords: Current mirror;laterally diffused p-channel metal-oxide-semiconductor (LDPMOS);nanoprobing;secondary electron potential contrast (SEPC)
Issue Date: 1-Oct-2011
Abstract: The mismatch mechanism in a current mirror consisting of laterally diffused p-channel MOS (LDPMOS) technology was investigated using a scanning electron microscope (SEM) with in situ nanoprobing. The electrical measurement found a saturation current mismatch of 52 mu A between the LDPMOS transistors. Furthermore, the proposed inspection identified successfully 0.4-mu m p-well layer misalignment, which was the root cause of the mismatch. This letter demonstrates that an in situ nanoprobing system is a powerful tool for enhancing p-well dopant contrast in a SEM, analyzing site-specific failures, and studying device physics under a dynamic scope.
URI: http://dx.doi.org/10.1109/LED.2011.2161567
ISSN: 0741-3106
DOI: 10.1109/LED.2011.2161567
Volume: 32
Issue: 10
Begin Page: 1418
End Page: 1420
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