標題: Design and fabrication of a three-dimensional long-stretch micro drive by electroplating
作者: Wu, CT
Tai, WC
Hsu, CP
Hsu, W
機械工程學系
Department of Mechanical Engineering
關鍵字: electro-thermal;three-dimensional;microactuator;hinge;electroplating
公開日期: 2003
摘要: Although lots of works have been devoted to develop the microactuators or microstructures, few researches have been done on three-dimensional microactuators. Here the feasibility investigation on a three-dimensional electrothermally driven long-stretch micro drive (LSMD) is proposed by integrating the LSMD and mechanical hinge mechanism. The LSMD (about 2000 mum x 500 mum) consists of two cascaded compliant structures in parallel. Each cascaded structure is formed by connecting several basic actuation units in series. The mechanical hinge is used to allow the LSMD to be lifted as a three-dimensional structure. One of the important issues in fabricating the three-dimensional microactuator is the conducting circuit to actuate the microactuator. Here the Ni electroplating process is used to fabricate the mechanical hinge structure and the LSMD, then the mechanical hinge itself can act as the conductive circuit easily. From the LSMD simulation results, several design parameters are found to have significant influence on the output displacements. Larger out-stretching displacements are feasible by proper choice of design parameters. Preliminary fabrication results of nickel-made LSMD exhibit output displacement of 190 mum at input voltage of 3 volts. Fabrication results of nickel-made three-dimensional LSMD are also presented.
URI: http://hdl.handle.net/11536/18496
http://dx.doi.org/10.1117/12.498920
ISBN: 0-8194-4976-8
ISSN: 0277-786X
DOI: 10.1117/12.498920
期刊: SMART SENSORS, ACTUATORS, AND MEMS, PTS 1 AND 2
Volume: 5116
起始頁: 295
結束頁: 302
Appears in Collections:Conferences Paper


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