標題: SYNTHESIS OF CARBON NITRIDE FILMS BY MAGNETICALLY ROTATED ARC-PLASMA JET CHEMICAL-VAPOR-DEPOSITION
作者: YEN, TY
CHOU, CP
交大名義發表
機械工程學系
National Chiao Tung University
Department of Mechanical Engineering
關鍵字: THIN FILMS;CHEMICAL SYNTHESIS;SCANNING AND TRANSMISSION ELECTRON MICROSCOPY;INELASTIC LIGHT SCATTERING
公開日期: 1-八月-1995
摘要: Carbon Nitride films have been grown on nickel substrates by magnetically rotated arc-plasma jet chemical vapor deposition (CVD). These films were characterized by scanning electron microscopy (SEM), wavelength dispersive X-ray spectrometry (WDS) transmission electron microscopy (TEM), and Raman spectroscopy. Small grains (similar to 0.1 mu m) as well as nanocrystallites found in the films were identified to be beta-C3N4. Raman spectrum also confirmed the existence of beta-C3N4 phase in the films through three pronounced Raman bands at low frequency as expected from the Hooke's law approximation.
URI: http://hdl.handle.net/11536/1786
ISSN: 0038-1098
期刊: SOLID STATE COMMUNICATIONS
Volume: 95
Issue: 5
起始頁: 281
結束頁: 286
顯示於類別:期刊論文


文件中的檔案:

  1. A1995RE08600004.pdf