標題: ANGULAR-DISTRIBUTION OF ELECTRONS ELASTICALLY BACKSCATTERED FROM NONCRYSTALLINE SOLID-SURFACES
作者: CHEN, YF
KWEI, CM
SU, P
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
公開日期: 14-十月-1995
摘要: In the energy range 100 eV-2 keV, we applied the Monte Carte method to analyse the elastic reflection coefficient and the angular distribution of electrons elastically backscattered from the solid surface of an isotropic and homogeneous medium. Results indicated that elastically backscattered electrons arose substantially from only a few scatterings with a single scattering event contributing to approximately half of these electrons. Thus, neither the multiple scattering model nor the single scattering model is sufficient to describe the angular distribution. To improve these models, we evaluated the contribution from one, two and three scatterings exactly and higher scatterings by the P-1-approximation, an approximate method to solve the Boltzmann transport equation assuming multiple elastic scattering of electrons in the solid. This approach allowed us to derive analytical formulations for the elastic reflection coefficient and the angular distribution of elastically backscattered electrons. Results calculated based on these formulations were in good agreement with those using Monte Carlo simulations and experimental data.
URI: http://dx.doi.org/10.1088/0022-3727/28/10/027
http://hdl.handle.net/11536/1698
ISSN: 0022-3727
DOI: 10.1088/0022-3727/28/10/027
期刊: JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume: 28
Issue: 10
起始頁: 2163
結束頁: 2169
顯示於類別:期刊論文


文件中的檔案:

  1. A1995TA90300027.pdf