標題: HIGH-PERFORMANCE PIRANI VACUUM GAUGE
作者: SHIE, JS
CHOU, BCS
CHEN, YM
交大名義發表
光電工程學系
National Chiao Tung University
Department of Photonics
公開日期: 1-十一月-1995
摘要: As an extension of previous work in our laboratory, a wide-range Pirani gauge that is capable of measuring vacuum pressure down to 10(-7) Torr reproducibly has been built, The micromachined Pirani sensor used in the experiments has a suspended membrane that is supported by the nearly radiation-limited, thermally insulating beam leads crossing over a V-groove cavity. A method of partial dummy compensation, as proposed previously by Weng and Shie for eliminating the ambient drift, is proved here to be very effective with a thermal drift as small as only 5.7 mu V/degrees C. It has also been found that a thermal-stress-induced piezoresistive effect, which has a profound influence on the limitation of measurement, appears in the constant-bias operation wherein the sensor temperature rises with the reduction of gas pressure and therefore thermal conduction. This effect causes the irreproducibility of pressure measurements by the device below 10(-5) Torr. In addition to its inherently higher sensitivity, a constant-temperature circuit together with a thermoelectric stabilization of the sensor substrate temperature can eliminate the induced piezoresistive error. The constant-temperature circuit operating on the micro-Pirani sensor together with the above-mentioned temperature compensation and the stabilization methods have extended gauge capability down to 10(-7) Torr, which is only limited by the signal readout resolution (similar to 1 mu V). This is three orders of magnitude more sensitive than the conventional vacuum gauges of the thermal conductivity type. (C) 1995 American Vacuum Society
URI: http://dx.doi.org/10.1116/1.579623
http://hdl.handle.net/11536/1680
ISSN: 0734-2101
DOI: 10.1116/1.579623
期刊: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
Volume: 13
Issue: 6
起始頁: 2972
結束頁: 2979
顯示於類別:期刊論文


文件中的檔案:

  1. A1995TF11100052.pdf