標題: The effects of annealing temperature and sputtering power on the structure and magnetic properties of the Co-Fe-Zr-B thin films
作者: Chen, Guo-Ju
Jian, Sheng-Rui
Jang, Jason Shian-Ching
Shih, Yung-Hui
Chen, Yuan-Tsung
Jen, Shien-Uang
Juang, Jenh-Yih
電子物理學系
Department of Electrophysics
關鍵字: Glasses;metallic;Calorimetry;Thermal stability;Microscopy;Magnetic properties
公開日期: 1-十一月-2012
摘要: The microstructure and magnetic properties of the amorphous Co-Fe-Zr-B thin films grown on glass substrates by dc magnetron sputtering are investigated using differential scanning calorimetry (DSC), transmission electron microscopy (TEM), and superconducting quantum interference device (SQUID) techniques. The Co-Fe-Zr-B thin films deposited at room temperature were annealed at temperatures ranged from 683 K to 773 K. Experimental results indicated that the coercivity (H-c) of the Co-Fe-Zr-B thin films is significantly influenced by residual stress and crystalline phases within the films. The correlation of the coercivity and the microstructure of Co-Fe-Zr-B thin films are discussed. After annealed at 683 K, the coercivity of the Co-Fe-Zr-B film was as low as 1.2 Oe. (C) 2012 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.intermet.2012.03.017
http://hdl.handle.net/11536/16791
ISSN: 0966-9795
DOI: 10.1016/j.intermet.2012.03.017
期刊: INTERMETALLICS
Volume: 30
Issue: 
起始頁: 127
結束頁: 131
顯示於類別:期刊論文


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  1. 000308847400023.pdf