Title: The effects of annealing temperature and sputtering power on the structure and magnetic properties of the Co-Fe-Zr-B thin films
Authors: Chen, Guo-Ju
Jian, Sheng-Rui
Jang, Jason Shian-Ching
Shih, Yung-Hui
Chen, Yuan-Tsung
Jen, Shien-Uang
Juang, Jenh-Yih
Department of Electrophysics
Keywords: Glasses;metallic;Calorimetry;Thermal stability;Microscopy;Magnetic properties
Issue Date: 1-Nov-2012
Abstract: The microstructure and magnetic properties of the amorphous Co-Fe-Zr-B thin films grown on glass substrates by dc magnetron sputtering are investigated using differential scanning calorimetry (DSC), transmission electron microscopy (TEM), and superconducting quantum interference device (SQUID) techniques. The Co-Fe-Zr-B thin films deposited at room temperature were annealed at temperatures ranged from 683 K to 773 K. Experimental results indicated that the coercivity (H-c) of the Co-Fe-Zr-B thin films is significantly influenced by residual stress and crystalline phases within the films. The correlation of the coercivity and the microstructure of Co-Fe-Zr-B thin films are discussed. After annealed at 683 K, the coercivity of the Co-Fe-Zr-B film was as low as 1.2 Oe. (C) 2012 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.intermet.2012.03.017
ISSN: 0966-9795
DOI: 10.1016/j.intermet.2012.03.017
Volume: 30
Begin Page: 127
End Page: 131
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