|標題:||Electroplated Ni-CNT Nanocomposite for Micromechanical Resonator Applications|
Cheng, Y. T.
Department of Mechanical Engineering
Department of Electronics Engineering and Institute of Electronics
|關鍵字:||Electroplated Ni-CNT nanocomposite;microelectromechanical systems (MEMS);quality factor;resonant frequency;resonator|
|摘要:||In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show similar to 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators.|
|期刊:||IEEE ELECTRON DEVICE LETTERS|