標題: Electroplated Ni-CNT Nanocomposite for Micromechanical Resonator Applications
作者: Lee, Yi-Chia
Li, Ming-Huang
Cheng, Y. T.
Hsu, Wensyang
Li, Sheng-Shian
機械工程學系
電子工程學系及電子研究所
Department of Mechanical Engineering
Department of Electronics Engineering and Institute of Electronics
關鍵字: Electroplated Ni-CNT nanocomposite;microelectromechanical systems (MEMS);quality factor;resonant frequency;resonator
公開日期: 1-六月-2012
摘要: In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show similar to 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators.
URI: http://hdl.handle.net/11536/16498
ISSN: 0741-3106
期刊: IEEE ELECTRON DEVICE LETTERS
Volume: 33
Issue: 6
結束頁: 872
顯示於類別:期刊論文


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