Full metadata record
DC FieldValueLanguage
dc.contributor.authorTai, Y. T.en_US
dc.contributor.authorPearn, W. L.en_US
dc.contributor.authorKao, Chun-Minen_US
dc.date.accessioned2014-12-08T15:23:16Z-
dc.date.available2014-12-08T15:23:16Z-
dc.date.issued2012-05-01en_US
dc.identifier.issn0894-6507en_US
dc.identifier.urihttp://hdl.handle.net/11536/16338-
dc.description.abstractProcess yield is the most common criterion used in the semiconductor manufacturing industry for measuring process performance. In the globally competitive manufacturing environment, photolithography processes involving multiple manufacturing lines are quite common in the Science-Based Industrial Park in Hsinchu, Taiwan, due to economic scale considerations. In this paper, we develop an effective method for measuring the manufacturing yield for photolithography processes with multiple manufacturing lines. Exact distribution of the estimated measure is analytically intractable. We obtain a rather accurate approximation to the distribution. In addition, we tabulate the lower conference bounds based on the obtained approximated distributions for the convenience of industry applications. We also develop a decision-making method for process precision testing to determine whether a process meets the process yield requirement preset in the factory. For illustration purposes, an application example is included.en_US
dc.language.isoen_USen_US
dc.subjectCapability indexen_US
dc.subjectlower confidence bounden_US
dc.subjectmultiple manufacturing linesen_US
dc.subjectprocess yielden_US
dc.titleMeasuring the Manufacturing Yield for Processes With Multiple Manufacturing Linesen_US
dc.typeArticleen_US
dc.identifier.journalIEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURINGen_US
dc.citation.volume25en_US
dc.citation.issue2en_US
dc.citation.epage284en_US
dc.contributor.department統計學研究所zh_TW
dc.contributor.department工業工程與管理學系zh_TW
dc.contributor.departmentInstitute of Statisticsen_US
dc.contributor.departmentDepartment of Industrial Engineering and Managementen_US
dc.identifier.wosnumberWOS:000303999400019-
dc.citation.woscount4-
Appears in Collections:Articles


Files in This Item:

  1. 000303999400019.pdf