Title: Physical Analysis of a Biomimetic Microphone With a Central-Supported (C-S) Circular Diaphragm for Sound Source Localization
Authors: Chen, Chien-Chang
Cheng, Yu-Ting
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
Keywords: Biomimetic microphone;central floating joint;central-supported diaphragm;clover;hybrid;MEMS microphone;parasitoid fly;quality factor;sound source localization;squeeze film air damping effect
Issue Date: 1-May-2012
Abstract: This paper presents a physical analysis of the biomimetic microphone designed with a central-supported (C-S) diaphragm for the sound source localization. A clover-stem-like C-S design is proposed and achieving 47% improvement of net diaphragm displacement in comparison with the conventional C-S diaphragm design. The new design can effectively not only compensate undesired deformation of sensing diaphragm due to gravity and residual stresses but also make the diaphragm more flexible for better sound pressure sensitivity.
URI: http://hdl.handle.net/11536/16007
ISSN: 1530-437X
Journal: IEEE SENSORS JOURNAL
Volume: 12
Issue: 5
End Page: 1504
Appears in Collections:Articles


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