標題: Glass biochip fabrication by laser micromachining and glass-molding process
作者: Huang, Chien-Yao
Kuo, Chao-Hui
Hsiao, Wen-Tse
Huang, Kuo-Cheng
Tseng, Shih-Feng
Chou, Chang-Pin
機械工程學系
Department of Mechanical Engineering
關鍵字: Laser micromachining;Precision glass molding;Micro channel;Biochip;Glass
公開日期: 1-Mar-2012
摘要: Due to their low cost, small size, and high-speed performance, biochips are often used in various bio-experiments. Compared with polymer-based biochips, glass-based substrates are less sensitive to heat and organic environments. This study presents a hybrid processing approach that uses laser micromachining (LMM) and precision glass molding (PGM) techniques to mass-produce glass-based biochips. A silicon carbide (SiC) mold with an outside diameter of 20 mm was used to hot emboss biochip channels measuring 200 mu m wide and 185 mu m deep. This study also identifies the optimal conditions for glass molding when processing soda-lime glass for biochip applications, and discusses the influence of the major processing parameters on biochip channel depth. This study uses the Taguchi method to assess the effects of several molding parameters on larger-the-better performance characteristics. The experiments in this study consider the effects of several molding parameters, such as molding temperature, pressing force, moving speed, temperature holding time, and vacuum environment, to achieve optimum characteristics for biochip channels. Orthogonal array analysis indicates that the optimal process parameters includes a 620 degrees C molding temperature, 1 kN pressing force, 5 mm/min moving speed, 60s temperature holding time, and a vacuum-free environment. This study also investigates the surface roughness of glass biochip channels. (C) 2011 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.jmatprotec.2011.10.013
http://hdl.handle.net/11536/15832
ISSN: 0924-0136
DOI: 10.1016/j.jmatprotec.2011.10.013
期刊: JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume: 212
Issue: 3
起始頁: 633
結束頁: 639
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