標題: Formation of nano-crystalline Si quantum dots in ZnO thin-films using a ZnO/Si multilayer structure
作者: Kuo, Kuang-Yang
Hsu, Shu-Wei
Chuang, Wen-Ling
Lee, Po-Tsung
光電工程學系
Department of Photonics
關鍵字: Si quantum dot;ZnO;Sputtering;Thin-films
公開日期: 1-二月-2012
摘要: In this study, we propose to fabricate ZnO thin-films with nano-crystalline Si (nc-Si) quantum dots (QDs) embedded using a ZnO/Si multilayer structure by radio-frequency (RF) magnetron sputtering method. Our results show that a high Si sputtering power (P-Si) can assist the formation of self-aggregated Si nano-clusters during deposition, which is helpful for the crystallization of nc-Si QDs and ZnO matrix during annealing. Great crystallinity and highly uniform size of nc-Si QDs are obtained for P-Si of 110 W. We experimentally demonstrate the formation of nc-Si QDs embedded in crystalline ZnO thin-films, which has a great potential for various electro-optical device applications. (C) 2011 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.matlet.2011.11.022
http://hdl.handle.net/11536/15661
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2011.11.022
期刊: MATERIALS LETTERS
Volume: 68
Issue: 
起始頁: 463
結束頁: 465
顯示於類別:期刊論文


文件中的檔案:

  1. 000300480600133.pdf