Title: Formation of nano-crystalline Si quantum dots in ZnO thin-films using a ZnO/Si multilayer structure
Authors: Kuo, Kuang-Yang
Hsu, Shu-Wei
Chuang, Wen-Ling
Lee, Po-Tsung
Department of Photonics
Keywords: Si quantum dot;ZnO;Sputtering;Thin-films
Issue Date: 1-Feb-2012
Abstract: In this study, we propose to fabricate ZnO thin-films with nano-crystalline Si (nc-Si) quantum dots (QDs) embedded using a ZnO/Si multilayer structure by radio-frequency (RF) magnetron sputtering method. Our results show that a high Si sputtering power (P-Si) can assist the formation of self-aggregated Si nano-clusters during deposition, which is helpful for the crystallization of nc-Si QDs and ZnO matrix during annealing. Great crystallinity and highly uniform size of nc-Si QDs are obtained for P-Si of 110 W. We experimentally demonstrate the formation of nc-Si QDs embedded in crystalline ZnO thin-films, which has a great potential for various electro-optical device applications. (C) 2011 Elsevier B.V. All rights reserved.
URI: http://dx.doi.org/10.1016/j.matlet.2011.11.022
ISSN: 0167-577X
DOI: 10.1016/j.matlet.2011.11.022
Volume: 68
Begin Page: 463
End Page: 465
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