標題: Step Height Measurement by Using Heterodyne Central Fringe Identification Technique
作者: Wu, W. T.
Hsieh, H. C.
Chen, Y. L.
Chang, W. Y.
Su, D. C.
光電工程學系
Department of Photonics
關鍵字: central fringe;heterodyne interferometry;electro-optic modulator;tunable laser;translation stage;step-height
公開日期: 2010
摘要: A simple method for measuring a step-height sample is presented with the heterodyne central fringe identification technique and a precision translation stage. This method can accurately point out the zero optical path difference position such that the optical path lengths of two arms of the interferometer are absolutely equivalent. Thus, the two surfaces of the step-height sample can be identified sequentially with the translation stage. The displacement of the translation stage is equal to the step-height of the test sample. The feasibility of the technique is demonstrated. The measurable range is not limited by the coherence length of the light source. The measurement accuracy depends on the uncertainties of the heterodyne central fringe identification method and the translation stage. In our setup, we have a 100 mm measurable range and a 4 nm uncertainty. The wavelength stability of the light source has a minor effect on the measurement.
URI: http://hdl.handle.net/11536/15224
http://dx.doi.org/10.1117/12.860356
ISBN: 978-0-8194-8263-1
ISSN: 0277-786X
DOI: 10.1117/12.860356
期刊: INSTRUMENTATION, METROLOGY, AND STANDARDS FOR NANOMANUFACTURING IV
Volume: 7767
顯示於類別:會議論文