標題: BIOLOGICAL SENSING SYSTEM
作者: Jeng-Tzong SHEU
Chih-Wei CHEN
公開日期: 19-Apr-2018
摘要: Provided is a biological sensing system, including a nanowire field-effect transistor and a sensing chip. A gate terminal of the nanowire FET surrounds a gate of a silicon nanowire or a gate of a silicon nanobelt, diameter of the silicon nanowire is less than 20 nm. A sensing electrode of the sensing chip is coupled to the gate terminal of the nanowire FET. An area ratio of an electrode area of the sensing electrode to a total sensing chip area, a thickness ratio of an oxide thickness of sensing electrode to a bulk oxide dielectric film thickness of the sensing chip and a capacitance ratio of an electrode capacitor of the sensing electrode to a gate capacitor of the silicon nanowire or a gate capacitor of the silicon nanobelt are optimized by means of an equivalent circuit so that potential coupling efficiency between sensing electrode and gate is optimized.
官方說明文件#: G01N033/543
H01L029/06
H01L029/739
H01L029/423
H01L029/66
G01N027/414
URI: http://hdl.handle.net/11536/151423
專利國: USA
專利號碼: 20180106796
Appears in Collections:Patents


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