|標題:||Light Enhancement of Silicon-Nanocrystal-Embedded SiOx Film on Silicon-on-Insulator Substrate|
Shih, M. H.
Department of Photonics
Institute of EO Enginerring
|摘要:||We reported the light enhancement from a silicon-nanocrystal-embedded SiOx film on a silicon-on-insulator (SOI) substrate in the visible light range. The light emission from the annealed SiOx film is one order stronger than the emission from a nonannealed SiOx film. Compared with the SiOx film on a Si substrate, two-fold enhancement in light emission from the SiOx film on a SOI substrate was also observed. The enhancement was attributed to better vertical confinement of optical field in the SiOx film on a SOI substrate. (C) 2011 The Japan Society of Applied Physics|
|期刊:||JAPANESE JOURNAL OF APPLIED PHYSICS|
|Appears in Collections:||Articles|