標題: Constructing a yield model for integrated circuits based on a novel fuzzy variable of clustered defect pattern
作者: Lin, Jun-Shuw
工業工程與管理學系
Department of Industrial Engineering and Management
關鍵字: Yield model;Clustered defects;Fuzzy logic control;Fuzzy variable of clustering pattern (FVCP);Ant colony optimization;Back-propagation neural network
公開日期: 15-Feb-2012
摘要: As the wafer size increases, the clustering phenomenon of defects becomes significant. In addition to clustered defects, various clustering patterns also influence the wafer yield. In fact, the recognition of clustering pattern usually exists fuzziness. However, the wafer yield models in previous studies did not consider the fuzziness of clustering pattern belonging to which shape in recognition. Therefore, the objective of this study is to develop a new fuzzy variable of clustering pattern (FVCP) by using fuzzy logic control, and predict the wafer yield by using back-propagation neural network (BPNN) incorporating ant colony optimization (ACO). The proposed method utilizes defect counts, cluster index (CI), and FVCP as inputs for ACO-BPNN. A simulated study is utilized to demonstrate the effectiveness of the proposed model. (C) 2011 Elsevier Ltd. All rights reserved.
URI: http://dx.doi.org/10.1016/j.eswa.2011.08.144
http://hdl.handle.net/11536/15007
ISSN: 0957-4174
DOI: 10.1016/j.eswa.2011.08.144
期刊: EXPERT SYSTEMS WITH APPLICATIONS
Volume: 39
Issue: 3
起始頁: 2856
結束頁: 2864
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