Title: Effect of graded-temperature arsenic prelayer on quality of GaAs on Ge/Si substrates by metalorganic vapor phase epitaxy
Authors: Yu, H. W.
Chang, E. Y.
Yamamoto, Y.
Tillack, B.
Wang, W. C.
Kuo, C. I.
Wong, Y. Y.
Nguyen, H. Q.
Department of Materials Science and Engineering
Department of Electronics Engineering and Institute of Electronics
Issue Date: 24-Oct-2011
Abstract: The growth of GaAs epitaxy on Ge/Si substrates with an arsenic prelayer grown with graded temperature ramped from 300 to 420 degrees C is investigated. It is demonstrated that the graded-temperature arsenic prelayer grown on a Ge/Si substrate annealed at 650 degrees C not only improves the surface morphology (roughness: 1.1 nm) but also reduces the anti-phase domains' (APDs) density in GaAs epitaxy (dislocation density: similar to 2 x 10(7) cm(-2)). Moreover, the unwanted interdiffusion between Ge and GaAs epitaxy is suppressed by using the graded-temperature arsenic prelayer due to the low energy of the Ge-As bond and the use of a low V/III ratio of 20. (C) 2011 American Institute of Physics. [doi:10.1063/1.3656737]
URI: http://dx.doi.org/10.1063/1.3656737
ISSN: 0003-6951
DOI: 10.1063/1.3656737
Volume: 99
Issue: 17
End Page: 
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