Title: Observation of Extreme-Ultraviolet-Irradiation-Induced Damages on High-Dielectric-Constant Dielectrics
Authors: Tsui, Bing-Yue
Li, Po-Hsueh
Yen, Chih-Chan
Department of Electronics Engineering and Institute of Electronics
Keywords: Border traps;extreme ultraviolet (EUV);high-dielectric-constant dielectrics;hole traps;interface states
Issue Date: 1-Nov-2011
Abstract: Extreme ultraviolet (EUV) irradiation may induce damages on high-dielectric-constant (high-k) dielectrics. In this letter, the EUV-irradiation-induced damages on HfSiO, HfAlO, and Al 2 O 3 are investigated. After EUV irradiation, hole traps, border traps, and interface traps are all increased. All of the three high-k dielectrics exhibit poorer immunity to the EUV irradiation than SiO(2). The oxide traps scale down with the dielectric thickness. Interfacial layer plays an important role in the increase of border traps and interface traps. Therefore, high-quality SiO-like interfacial layer is critical for radiation-hard devices.
URI: http://dx.doi.org/10.1109/LED.2011.2165521
ISSN: 0741-3106
DOI: 10.1109/LED.2011.2165521
Volume: 32
Issue: 11
Begin Page: 1594
End Page: 1596
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