標題: Develop a novel thermal switch through CMOS MEMS fabrication process
作者: Lai, You-Liang
Chou, Lei-Chun
Juang, Ying-Zong
Tsai, Hann-Huei
Huang, Sheng-Chieh
Chiou, Jin-Chern
電控工程研究所
Institute of Electrical and Control Engineering
公開日期: 1-Jan-2011
摘要: This paper focuses on implementing two novel CMOS-MEMS type switches: buckling type and thermal type, by using commercially available TSMC 0.35 mu m two-poly four-metal (2P4M) CMOS process. There are two novel designs in these two type switches: first, the soft contact structure with post-processing fabrication; second, using residual stress to achieve large structural deformation in buckling type and thermal type switches. To create the soft contact structure, residual gradient stress effect has been utilized to make bending-down curvatures. According to the experiments, the layer Metal1 has the largest negative residual gradient stress [1] effect that can achieve the largest negative deflection in z-axis. Because the structure will bend down after post-processing release, larger lateral contact area are set up to gain the lower contact miss ability. In the post-processing fabrication, 0.3 mu m thickness gold will be deposited on the contact tips. Due to the essence of gold, comparing with aluminum, has no oxidation issue, gold also has the advantage of higher conductivity to reduce the electrical power loss. In the buckling type design, the switch uses residual stress to achieve lateral buckling effect to solve long distance problem. In the thermal type design, this paper design a folded-flexure [2, 3] with the electro-thermal excitation to turn the switch on or off. In the prototype, the device size is 500 mu m x 400 mu m and the gap between two contact pads is 9 mu m in off-state. on the experimental results, the switch can work stably at 3 volts, and the displacement of the thermal type switch can achieve 2.7 mu m, which is sufficient for the mechanism of switching-on or switching-off.
URI: http://dx.doi.org/10.1117/12.874420
http://hdl.handle.net/11536/146313
ISBN: 978-0-8194-8463-5
ISSN: 0277-786X
DOI: 10.1117/12.874420
期刊: MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XVI
Volume: 7926
起始頁: 0
結束頁: 0
Appears in Collections:Conferences Paper


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