標題: Characterization of anodic aluminum oxide film and its application to amorphous silicon thin film transistors
作者: Liang, CW
Luo, TC
Feng, MS
Cheng, HC
Su, D
材料科學與工程學系
電子工程學系及電子研究所
奈米中心
Department of Materials Science and Engineering
Department of Electronics Engineering and Institute of Electronics
Nano Facility Center
關鍵字: anodization;Al2O3;amorphous silicon;thin film transistor
公開日期: 1-二月-1996
摘要: AL(2)O(3)/SINx double-layered dielectric films suitable for large-size amorphous silicon thin film transistor liquid crystal displays (a-Si:H TFT LCD) have been prepared by anodization and plasma enhanced chemical vapor deposition (PECVD). Al2O3 films were formed at various pH values and volume ratio of water (H2O%) in the electrolyte. The optimal quality of Al2O3 film was achieved at pH = 6 and H2O% = 30. These high-quality Al2O3 films have denser structure, lower etching rate (90 Angstrom min(-1)) and smooth surface morphology after etching. The capacitors made of the anodization show a breakdown field as high as 7.8 MV cm(-1) and a low leakage current density of 10 nA cm(-2) at a dielectric field of 3 MV cm(-1). Furthermore, a-Si:H TFTs with Al gate and different gate dielectrics (Al2O3/SINx and SiNx) were also fabricated and evaluated. The TFTs with Al2O3/SiNx double-layered gate dielectric provide better performances, such as the smaller threshold voltage (1.76 V), improved subthreshold swing (1.0 V dec(-1)), and lower off-current (3.8 PA) than those of the device with single SiNx, film.
URI: http://dx.doi.org/10.1016/0254-0584(95)01619-6
http://hdl.handle.net/11536/1461
ISSN: 0254-0584
DOI: 10.1016/0254-0584(95)01619-6
期刊: MATERIALS CHEMISTRY AND PHYSICS
Volume: 43
Issue: 2
起始頁: 166
結束頁: 172
顯示於類別:期刊論文


文件中的檔案:

  1. A1996TZ39800013.pdf