|標題:||Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures|
|作者:||Kuo, F. Y.|
Lin, C. Y.
Chuang, P. C.
Chien, C. L.
Yeh, Y. L.
Wen, Stella K. A.
Department of Electronics Engineering and Institute of Electronics
|關鍵字:||Silicon resonator;CMOS MEMS sensor;single process for multiple sensors;monolithic design|
|摘要:||In this paper, we demonstrated a resonator-based MEMS architecture for multi-sensor SOC applications. A newly developed 0.18 mu m 1P6M CMOS ASIC/MEMS process was adopted to integrate MEMS sensor and circuits monolithically. By using resonators as the building blocks, multiple MEMS sensors including environmental temperature sensor, ambient pressure sensor, accelerometer as well as gyro sensor can be monolithically implemented with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post processes. The proposed architecture enables compact and innovative sentient-assisted SOC design for the emerging IOT applications.|
|期刊:||IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY|
|Appears in Collections:||Articles|
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