標題: A Miniature Magnetic-Force-Based Three-Axis AC Magnetic Sensor with Piezoelectric/Vibrational Energy-Harvesting Functions
作者: Hung, Chiao-Fang
Yeh, Po-Chen
Chung, Tien-Kan
機械工程學系
國際半導體學院
Department of Mechanical Engineering
International College of Semiconductor Technology
關鍵字: AC magnetic sensor;magnetic force;piezoelectric;mechanical;3-axis;energy harvesting
公開日期: 1-Feb-2017
摘要: In this paper, we demonstrate a miniature magnetic-force-based, three-axis, AC magnetic sensor with piezoelectric/vibrational energy-harvesting functions. For magnetic sensing, the sensor employs a magnetic-mechanical-piezoelectric configuration (which uses magnetic force and torque, a compact, single, mechanical mechanism, and the piezoelectric effect) to convert x-axis and y-axis in-plane and z-axis magnetic fields into piezoelectric voltage outputs. Under the x-axis magnetic field (sine-wave, 100 Hz, 0.2-3.2 gauss) and the z-axis magnetic field (sine-wave, 142 Hz, 0.2-3.2 gauss), the voltage output with the sensitivity of the sensor are 1.13-26.15 mV with 8.79 mV/gauss and 1.31-8.92 mV with 2.63 mV/gauss, respectively. In addition, through this configuration, the sensor can harness ambient vibrational energy, i.e., possessing piezoelectric/vibrational energy-harvesting functions. Under x-axis vibration (sine-wave, 100 Hz, 3.5 g) and z-axis vibration (sine-wave, 142 Hz, 3.8 g), the root-mean-square voltage output with power output of the sensor is 439 mV with 0.333 mu W and 138 mV with 0.051 mu W, respectively. These results show that the sensor, using this configuration, successfully achieves three-axis magnetic field sensing and three-axis vibration energy-harvesting. Due to these features, the three-axis AC magnetic sensor could be an important design reference in order to develop future three-axis AC magnetic sensors, which possess energy-harvesting functions, for practical industrial applications, such as intelligent vehicle/traffic monitoring, processes monitoring, security systems, and so on.
URI: http://dx.doi.org/10.3390/s17020308
http://hdl.handle.net/11536/144120
ISSN: 1424-8220
DOI: 10.3390/s17020308
期刊: SENSORS
Volume: 17
Issue: 2
起始頁: 0
結束頁: 0
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